P1.1.17 Integration of carbon nanotubes to three-dimensional C-MEMS for glucose sensors

Shuang Xi, Tielin Shi, Lei Zhang, Dan Liu, Hu Long, Shiyuan Liu & Zirong Tang
A novel design and fabrication of glucose sensors based on carbon nanotubes (CNT) integrated with carbon microelectromechanical system (C-MEMS) were reported in this work. Photolithography of CNT mixed SU-8 photoresist and the self-assembly of CNTs during the developing process were followed by the controlled pyrolysis process to form CNT integrated three-dimensional C-MEMS electrode array. Immobilization of enzyme onto these electrodes was carried out through co-deposition of glucose oxidase (GOx) and electrochemically polymerized polypyrrole (PPy) for...