P1.2.10 Recycling of Cantilevers for Nanoparticle Detection by Lift-off Technique

S. Merzsch, H. S. Wasisto, A. Waag, E. Peiner, I. Kirsch, E. Uhde & T. Salthammer
Monitoring of engineered airborne nanoparticles is prerequisite to their safe industrial use. Workmen, inhaling particles, are endangered to sustain health hazards. A silicon resonant cantilever sensor has been proven a tool for sampling and recognizing airborne particles at high sensitivity. For repeated usability of the resonator the trapped particles have to be removed which is accomplished by a sacrificial layer deposited on the polluted cantilever surface. Particles, forced by an electrostatic field, settle on top...