P1.2.12 Uncoated PZT thick film cantilever for chemical species detection in gaseous phase

Riadh Lakhmi, Hélène Debéda & Claude Lucat
Coated silicon cantilevers functioning with flexural mode are classically used for chemical species detection. Recently, new types of entirely screen-printed piezoelectric PZT cantilevers operated with the unusual "in-plane" 31-longitudinal mode have been shown to be good candidates for actuation, sensing or energy harvesting applications. In order to prevent from ageing phenomena linked to the sensitive layer, the cantilever sensors may be used without any coating. Detection of water and ethanol is successfully performed using the...