P1.2.4 Efficient detection of ammonia using SAW devices coated with oxide sensing layers

V. Bhasker Raj, Vinay Gupta, A. T. Nimal, M. U. Sharma & Monika Tomar
Ammonia sensing response characteristics of the Surface Acoustic Wave (SAW) sensors having different oxide thin films (ZnO, TeO2, SnO2 and TiO2) deposited by RF sputtering technique under the optimized parameters as sensing layer have been studied. SAW sensor with ZnO sensing layer is found to be exhibiting the maximum response towards liquor ammonia as compared to other oxides. The SAW sensor structure showed a peculiar bidirectional shift (increase or decrease) in frequency on exposure to...