P1.2.7 Influence of Zinc oxide films structure on biological protein adsorption for SAW biosensors

Qiuyun Fu, Jianfeng Deng, Dongxiang Zhou, Shuping Gong, Shujing Zhong & Wei Luo
Zinc oxide films used for ZnO/SiO2/Si based surface acoustic wave (SAW) Love mode sensors, were fabricated. ZnO films surface structure will affect the adsorption of the biological protein on the surface, which has an influence on the sensitivity of the SAW sensors. The structural properties of ZnO films prepared by RF magnetron sputtering have been characterized by Thornton's structure zone model. The X-ray diffraction (XRD) patterns show that the films are highly oriented with their...