P1.4.7 Sensing Properties for the Hydrogen Micro Sensor with Modified Palladium Film

Jin-Ho Yoon, Bum-Joon Kim & Jung-Sik Kim
A micro hydrogen gas sensor platform was fabricated using a MEMS processes. A nano-bumpy structure was examined using a polystyrene aqueous suspension to develop the surface areas of sensing area (palladium thin film). The palladium film was deposited on the fabricated platform by a R.F. magnetron sputtering. The cross section of each AFM image was analyzed in terms of the mean surface roughness. The root-meansquare roughness of the nano-bumpy Pd structure was 9.07 nm whereas...