P1.4.9 Improvement of Si Field Emission Sensors Fabrication Technology by Carbon Nanotubes

Michel O. S. Dantas, Elisabete Galeazzo, Henrique E. M. Peres & Francisco J. Ramirez-Fernandez
Field Emission (FE) devices were successfully improved by the association of silicon (Si) microtips and Multi-Walled Carbon Nanotubes (MWCNTs). MWCNTs were deposited over Si microtips by Electrophoretic Deposition (EPD), and improvements up to 80% in electron emission characteristics were reported, being suitable for the development of gas ionization sensors based on FE devices.