P1.8.4 Fabrication and Characterization of Hydrogen Sensors Using Graphenes Formed on the 3C-SiC Thin Films

Sang-Jin Bae, Kang-San Kim & Gwiy-Sang Chung
This paper presents the fabrication and characterization of graphene based hydrogen sensors. Graphenes were synthesized by annealing process of Ni/3C-SiC thin film. The Ni thin film was deposited on a 3C-SiC substrate and used extracts the substrate's carbon atoms under rapid thermal annealing. Synthesized graphene transferred onto SiO2 substrate by chemically etching of Ni in HF solution. Au electrode on the graphene shows ohmic contact and the resistance was changed with hydrogen concentration. Initial resistance...