P2.0.17 Ta2O5 nanoporous membrane for chemical sensing in harsh environment

Alexander Imbault, Yue Wang, Peter Kruse, Elisabetta Comini, Giorgio Sberveglieri, Evheni Strelcov & Andrei Kolmakov
The conductometric gas sensors made of nanoporous oxide ultrathin membranes can be particularly promising for the active sampling of the diluted analytes. Here we report the case study of the electron transport and gas sensing properties of such a membrane made of Ta2O5. In spite of well-known high thermal and chemical stability, Ta2O5 membranes appear to exhibit noticeable chemical sensitivity at high temperatures above 300 C. The proposed suspended architecture of the gas penetrable Ta2O5...