P2.0.5 Studies of Hydrogen Gas Sensing Properties of Anatase TiO2 Thin Films Prepared by Magnetron Sputtering

Azhar Ali Haidry, Pavol Durina, Martin Truchly, Leonid Satrapinsky, Tomas Plecenik, Marian Mikula, Branislav Grancic, Tomas Roch, Maros Gregor, Peter Kus, Andrej Plecenik & Milan Tomasek
Titanium dioxide thin films were deposited on sapphire substrates by reactive dc magnetron sputtering method. The prepared thin films were then annealed in air at various temperatures (600 - 800 °C) to achieve crystalline thin films having anatase phase. The comb-like Pt electrodes, with a distance of 10 µm, were prepared on the top of the films to measure the electrical and gas sensing properties. The films prepared in this work showed high electrical response...