P2.0.9 Interaction of Water Vapor with SnO2

K. Watanabe, T. Ohgaki, N. Saito, S. Hishita, I. Sakaguchi, H. Haneda & N. Ohashi
In order to observe the interaction between the water vapor and SnO2, water vapor sensing and water vapor/solid exchange reaction using isotopic water were performed. The resistivity of SnO2 thick film at 200-500°C in Ar decreased by exposing water vapor + Ar. The highest sensing response was observed at 300°C. The isotopic water (D2O) was used as the tracer. After annealing in D2O vapor, incorporation of deuterium (D) into solid was confirmed by the secondary...