P2.2.1 An Integrated Passive Impedance-loaded SAW Sensor

Wei Luo, Jianfeng Deng, Qiuyun Fu, Dongxian Zhou, Shupin Gong & Guoping Yan
An integrated passive impedance-loaded SAW H2S sensor working at low temperature has been presented in this paper. The sensor consists of a SAW delay line and a resistive H2S sensor as impedance-loaded sensor connected to an SAW IDT. The SAW delay line is fabricated on a 128° LiNbO3 substrate and its center frequency is 233 MHz. The resistive sensor composed of the nanocrystalline SnO2 film and Al electrodes is also fabricated on the same substrate....