P2.2.13 Enhanced Love Wave Effect on STW Resonator by ZnO layer for sensor application

Jia Hu, Yadong Jiang, Xiaosong Du, Hongjun Jing & Guangzhong Xie
Surface transverse wave(STW) resonator was evaluated for the potential use in detecting dimethyl methyl phosphonate (DMMP) vapors. The device's noise was decreased by the resonator's low insertion loss and high Q value, while a ZnO wave guide layer was coated on the STW device surface to generate Love wave effect, which enhanced the mass sensitivity of the device. Those contributed to improving the limit of detection(LOD) of sensor. The DMMP sensor is obtained by coating...