P2.4.2 Molybdenum Oxide Nanorods Based Thin Films: Effect of Electrode Metallization on Hydrogen and Ethanol Sensing

Navas Illyaskutty, Heinz Kohler, T. Trautmann, V. P. Mahadevan Pillai & M. Schwotzer
Nanostructured molybdenum oxide (MoO3) gas sensitive layers were deposited on Au and Pt interdigitated electrodes (IDE) integrated to alumina substrates by RF magnetron sputtering and controlled post deposition annealing. Sensitivity test measurements towards hydrogen and ethanol vapour under non-humid and humid ambience at isothermal (200°C a nd 300°C) operation are presented. Extremely different response behaviour to the analytes depending on operating temperature, background humidity and electrode material was observed. The humid ambience does not significantly...