P2.5.1 Long-Term Stability of the Low Energy Hydrogen Sensor

Anne-Kathrin Gerlitzke, Kai Nörthemann, Michael Lang, Werner Moritz, Ulrich Banach, Thomas Hübert, Michael Milstrey, Raig Kaufer & Michael Woratz
A silicon MIS-structure prepared with thin layers of the super-ionic conductor LaF3 and Pd is used to detect hydrogen. The sensor is able to detect hydrogen in a concentration range from below one ppm to the lower flammable limit in air which is 4 vol.-%. The chip operates at room temperature which results in an extremely low energy consumption compared to other hydrogen sensors. Only once per day a short heating pulse is necessary to...