P2.7.10 Individual Metal Oxide Nanowire contacted onto MEMS substrates for Monitoring of Toxic Species

Roman Jimenez-Diaz, Jordi Sama, Paul Clapera, J. Daniel Prades, Albert Romano-Rodriguez, Francisco Hernandez-Ramirez, Joaquín Santander, Isabel Gracia, Carlos Calaza, Luis Fonseca & Carles Cané
Metal oxide nanowires are used for their integration in gas nanosensors. These semiconducting nanowires are deposited onto suspended sensing platforms and are electrically contacted (a single nanowire in each substrate) by means of electron beam induced deposition inside a FIB dual beam system. The platforms are equipped with a buried integrated resistor that permits their heating, allowing to tune the reactio n of the gas species with the surface of the nanowire, thus controlling the...