P2.7.9 TiO2 Nanohelix Gas Sensors with Enhanced Performance and Potential Application as a Building Block of Electronic Noses

Sunyong Hwang, Hyunah Kwon, Sameer Chhajed, Jiseong Im, Sang Ho Oh, Jong Kyu Kim, Ji Won Byon, Jeong Min Baik, Ho Won Jang & Seok Jin Yoon
We present TiO2 nanohelix gas sensors with top-and-bottom electrodes configuration fabricated by oblique angle deposition (OAD) that is very simple, easy, and compatible with conventional microfabrication processes. The combination of large surface-to-volume ratio, extremely small size (~ 22 nm) with near single crystallinity of TiO2 nanohelices, together with the top-and-bottom electrodes configuration results in a huge enhancement in gas sensing performances including ~10 times higher sensitivity, ~5 times lower detection limit, and much faster response...