P2.8.3 Adsorbent Composites Used on Mixing in Miniaturized Structures

Leonardo F. Hernandez, Roberto R. Lima, Alisson R. Leite, Estevão R. Fachini & Maria Lúcia P. Silva
This work aims at the production, characterization and use of adsorbent plasma thin films in miniaturized structures. The films were designed to perform as passive mixers or adsorptive layers in sensors. Clustered films from tetraethoxysilane (TEOS) and nonafluoro(iso)butyl ether (HFE®) precursors on silicon, acrylic and glass substrates were prepared in an in-built plasma reactor. Profilometry and ellipsometry measurements were performed to determine thickness and refractive indexes. The chemical composition and the presence of carbon nodules...