P3.1 - Development and Characterization of a High Precision Vibratory MEMS Gyroscope System with Low-Noise Integrated Readout and Control Electronics

D. Köhler, S. Konietzka, A. Pohle, S. Heinz, A. Lange, R. Forke, D. Billep & K. Hiller
In this work a MEMS vibratory gyroscope fabricated with a high aspect ratio technology (25:1) and high quality factor (Q> 90,000) in combination with an ASIC for low noise integrated readout (0.4 μV/ rtHz), control and compensation electronics will be introduced. The development of the sensor system focuses on a very symmetric design of the mechanical element as well as of the electronics excitation and detection to be able to detect capacitance changes of few...