I1.2 - High-Performance Pyroelectric Infrared Detectors

Marco Schossig, Volkmar Norkus & Gerald Gerlach
We report on the fabrication of ultrathin self-supporting LiTaO3 layers for high-performance pyroeledric single-element detectors. Thereby, only the area of the radiation-sensitive element is reduced to the desired thickness to keep the mechanical stability of the pyroelectric chip. This is done by an ion beam etching process at which a minimum thickness of 600 nm could be achieved. The small element thickness leads to a reduced heat capacity of the radiation-sensitive element resulting in a...