I1.3 - Thermopile infrared sensor with precisely patterned high-temperature resistant black absorber layer

A. Ihring, U. Dillner, E. Kessler & T. Hoyer
A thermopile infrared microsensor with a new broad band absorber layer is presented. Based on special carbon particles incorporated in a heteropolysiloxane nano composite matrix, which can be spin-coated on a wafer, the new absorber layer is high-temperature resistant up to 300 °C and can be patterned precisely by etching technologies. The sensor has a circular absorber area of 0.5 mm diameter. If nitrogen-backfilled, the sensor showed a responsivity and time constant of 280 V/W...