I3.1 - Design, Operation and Performance of a Fabry-Perot-Based MWIR Microspectrometer

Martin Ebermann, Norbert Neumann, Karla Hiller & Steffen Kurth
In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step-scan mode and continuous-sweep mode are demonstrated. Such a device has a large potential in...