IP8 - Fabrication and Characterization of IC-Compatible Multilayer Interference Filters

G. De Graaf, A. Emadi & R. F. Wolffenbuttel
This paper reports the design and characterization of IC-compatible Multilayered Fabry-Pérot Midinfrared optical filters. The filters have been designed for application in Mid-infrared Spectrometry. An important class of microspectrometers in IC technology is based on arrays of optical filters and detectors composed of IC-compatible materials with proper optical properties over the spectral range of interest. An IC-processed wafer with circuits and a micro-fabricated array of IR detectors can be used as a generic platform and...