IP9 - Thermal Cross-Talk in IC-Compatible Micromachined Infrared Thermopile Detector Arrays

Huaiwen Wu
Arrays of thermal detectors are widely applied in optical instruments. IC technology enables the fabrication of large numbers of indentical thermal sensors. Thermal cross-talk between neighboring sensors is a common problem in these devices. This papaer discusses thermal cross-talk in ThermoElectric (TE) detector array on thin-film bridges for an infrared(lR) micro-spectrometer. In this system the disprsed IR spectrum from a different grating is projected onto a detector array. The position of a spectral component within...