1.3 - High Detectivity Uncooled Thermopile IRFPA Chip Prepared by Surface Micromachining

U. Dillner, F. Hänschke, U. Schinkel & H.-G. Meyer
Thermopiles as thermal detectors are characterized by their simplicity and ruggedness of construction corresponding to low cost. They exhibit a uniform broadband response over the infrared spectrum, can be operated without cooling and generate a signal voltage, which is strictly proportional to the incoming radiation over many orders of magnitude and, moreover, insensitive to substrate temperature variations. In addition, they require neither an electrical bias nor an optical chopper and do not generate 1/f noise....