1.4 - Internal Thermal Amplification for Increasing the Responsivity of Pyroelectric Detectors

Y. Querner, V. Norkus & G. Gerlach
This paper describes a new method for increasing the responsivity of pyroelectric detectors in voltage mode. A three-dimensional pattern is etched into the sensitive element. This leads to thicker electrical active areas and thinner electrical passive areas. In such a structure a lateral heat flux from thinner to thicker regions is generated due to faster heating of the thinner part based on minor thermal mass. This additional heat flow into the thicker electrically active areas...