2.1 - High Performance Uncooled Amorphous Silicon IRFPA with 17μm Pixel-Pitch

J.-L. Tissot, S. Tinnes, A. Durand, C. Minassian, P. Robert & M. Vilain
The high level of accumulated expertise by ULIS and CEA/LETI on uncooled microbolometers made from amorphous silicon with 45 μm, 35 μm and 25 μm, enables ULIS to develop new IRFPA formats with 17 μm pixel-pitch to fulfill every applications. Amorphous silicon presents attractive properties for microbolometer applications. In particular, when it comes to address TEC-less capability, amorphous silicon devices are coping quite well with temperature variation. The bolometer resistance variation versus temperature is described...