2.3 - IR Imaging of Mircosystems: Special Requirements, Experiments and Applications

K.-P. Möllmann & M. Vollmer
For a lot of microsystems a uniform temperature or a spatial temperature distribution as well as thermal response time are among the most important parameters. Any contact probe for temperature measurement would induce appreciable thermal losses due to thermal conduction which either complicates the analysis or even makes it impossible. Therefore a contactless measurement is needed to analyze these parameters for microsystem components (e.g. reactors, sensors, actuators). Obviously IR imaging can play an important role...