2.5 - Miniaturized 4x16 Thermopile Array Sensor with Integrated on Signal Conditioning on Chip

V. Kassovski, A. Grigorov, H. Hristov, P. Nedelev, B. Forg, F. Herrmann, W. Leneke & J. Schieferdecker
We present a 4x16 Thermopile Array (TPA) with 64 signal conditioning channels integrated on a CMOS silicon chip . Each channel consist of a low noise amplifier, a 2nd order Delta Sigma converter and a digital low-pass filter. The digitization resolution of the channel is 16-bit. Thanks to processing all pixels in parallel, the achieved Noise Equivalent Temperature Difference (NETD) can be limited to 0.2 ºC @1Hz frame rate. Next to the 4x16 IR sensors...