3.3 - New Microsystems-Based IR Gas Sensing Technology

P. Ohlckers, A. Kropachev & J. Kunsch
Combining Bulk Silicon Micromachining (BSM) with Diamond-Like Carbon (DLC) thin film technology can be favourably used to make high performance MEMS devices. We highlight the versatility of BSM combined with the unique features of our proprietary nanoamorphous carbon (NAC) thin film technology to make high performance MEMS devices at favourable cost. A family of high performance infrared emitters has been designed and commercialised, with the most distinctive features being high speed with a modulation depth...