4.4 - Tiny Mid- and Long-Wave Infrared Spectrometer Mo¬dule with a MEMS Dual-Band Fabry-Pérot Filter

M. Ebermann, N. Neumann, S. Hoppe, K. Hiller, M. Meinig, St. Kurth & E. Gittler
Cost effective and highly miniaturized spectrometer modules for infrared absorption spectroscopy in the mid wave infrared (MWIR) based on the hybrid integration of pyroelectric detectors and MEMS Fabry-Pérot filters (FPF) have been developed and are commercially available. The filters, based on bulk micromachining and Si-SiO2 Bragg reflectors exhibit a high finesse up to 60 over the entire aperture of Ø 1.9 mm. However, many substances have strong and more specifiable absorption bands in the long...