P12 -Out-of-plane Translatory MEMS Actuator with Extraordinary Large Stroke for Optical Path Length Modulation in Miniaturized FTIR Spectrometers

T. Sandner, T. Grasshoff, H. Schenk & A. Kenda
Fourier Transform Infrared (FT-IR) spectroscopy is a widely used method to analyze different materials - organic and inorganic. Current FT-IR spectrometers are large, usually static, and are operated by qualified personnel. By using translational MOEMS devices for optical path length modulation instead of conventional highly shock sensitive mirror drives a new class of miniaturized, robust, high speed and cost efficient FTIR-systems can be addressed. An early approach of a miniaturized MEMS based FTIR spectrometer has...