P3 - A Pneumatic Infrared Detector with Capactive Read-out Circuit

M. Schossig, V. Norkus & G. Gerlach
Common types of thermal infrared sensors are thermopiles, bolometers, pyroelectric detectors and Golay cells. Although the three former types have been miniaturized by using silicon micromachining and thin-film technology, the Golay cell has not been improved very much recently. Some miniaturized Golay cell type of sensors have been developed using silicon micromachining technology together with a tunneling displacement transducer or a capacitive detector as readout mechanism. Due to the high heat conductivity of silicon the...