P8 - Application of PZT Thin-Film Technology for Angular Resolved Flame Detection

S. Hoppe, M. Ebermann & N. Neumann
We demonstrate the application of thin film PZT sensor arrays to build the active elements of a pyroelectric flame detector. The used thin film PZT sensor arrays are produced by PYREOS Ltd, Edinburgh, Scotland. The PZT thin film is co-sputtered from metal targets in an oxygen atmosphere onto platinized silicon wafers and the PZT film is subsequently patterned in to 3x3 arrays. These films show high pyroelectric coefficients, very low dielectric losses and favourable dielectric...