P2 - A miniaturized thermopneumatic infrared detector with capacitive read-out circuit

M. Schossig, V. Norkus & G. Gerlach
In this paper we present an improved design of a miniaturized thermopneumatic infrared detector with capacitive read-out circuit. The hybrid assembly basically consists of a sealed cavity and a capacitive displacement transducer fabricated with silicon micromachining. The IR absorber is placed on a thin, free-standing silicon nitride membrane centrally arranged in the cavity. The very small capacitance changes are measured with an extremely sensitive 24-bit sigma-delta converter capable of detecting capacitance changes of a few...