P4 - Methodology for micro-fabricating free standing micromechanical structures for infrared detection

M. Steffanson, T. Ivanov & I. W. Rangelow
Within our research and development activities on thermo-mechanical infrared sensitive microstructures we have developed a comprehensive methodology and strategy to develop, fabricate, characterize and evaluate a novel-type micro-device. In this paper we use and explain the example of fabricating two types of micro-mechanical, fully-functional, free-standing structures by using plasma and low pressure chemical vapour deposition technology. Methods of micro-fabrication techniques, such as bulk micro-fabrication and surface micro-machining are analyzed and our critical processtechnology findings are...