O4.4 - Relibility Analysis of Indicator Functions in an Automated Multiscale Measuring System

A. Burla, J. Regin, W. Lyda, J. Zimmermann, W. Osten, E. Westkaemper & O. Sawodny
Modern micro systems are manufactured in batch processes at wafer scale with critical functional components in sub-micron dimensions. To ensure high quality of these components high resolution inspection systems are needed. Due to the limited area-related resolution of commercial available sensors a conflict between measurement time, object size and resolution arises. In former publications we have presented the general design of an Automated Multiscale Measuring System (AMMS) based on an intelligent and hierarchical measurement strategy...