1.1 - SensMiLi: Optical Absolute Position-Encoder by Single-Track, Q-ary Pseudo-Random-Sequences for Miniature Linear Motors

D. Wibbing, J. Binder, W. Schinköthe, Ch. Pauly, C. Gachot & F. Mücklich
Motivation In Industry sectors like the semiconductor-, electric light assembly or the biomedical-industry, in which work is carried out in clean environments, actuators are needed that can move small parts with an acceleration of several hundred m/s2 and a precision in the one-digit micrometer range. Miniature linear motors have the dimensional and dynamic characteristics to optimise these processes. However there has not been a sufficient solution for an absolute position encoder capable of being integrated...