1.2 - Position Encoding and Phase Control of Resonant 2D-MOEMS-Mirrors

A. Tortschanoff, A. Frank, M. Lenzhofer, A. Kenda, M Wildenhain & T. Sandner
Resonant micromechanical scanner mirrors can be fabricated using CMOS compatible technology. They are driven electrostatically with a pulsed driving voltage close to the double of their eigenfrequency and are of high interest for various fields in optics, telecommunications and spectroscopy. Position encoding of the mirror movement is crucial for most applications. Furthermore for stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. For this reason, we have developed...