P10 - Analog Driver for Synchronized Resonant and Quasistatic MOEMS Mirrors

M. Lenzhofer, A. Frank, A. Kenda, A. Tortschanoff & T. Sandner
We have developed and implemented a closed loop driving concept in order to synchronize electrostatically driven MOEMS components, which have attracted increasing interest due to their possible applications in MOEMS based pico-projection devices, bar-code scanners, spectrometers, endoscopes, 3D distance scanners and others. Synchronized driving of several scanner mirrors is a major challenge, due to the spread in the properties like resonance frequency and response curves of the micromechanical components. Two different drivers were developed in...