1.4 - Quasi-static Microscanner with Linearized Scanning for an adaptive 3D-Lasercamera

Th. Sandner, Th. Grasshoff, M. Schwarzenberg & H. Schenk
This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective...