A5.3 - Optical Sensor for Flow Measurement in Microstructures

Jens Zosel, Ulrich Guth, Dieter Petrak & Hagen Rauh
The galvanic production of electronic and micro mechanical components is accompanied by continuous miniaturisation of structures and therefore needs to be improved with respect to the exchange rate of electrolytes and cleaning fluids in the micro structures. Numerous conditions in modern devices for continuous galvanic plating of microstructures are opposed to the application of electrical, thermal and electrochemical sensors as well as to classical optical methods like micro-PIV or micro-LDA for flow measurements in the...