B3.2 - Ultra-Low Power Pressure Sensing: A Capacitive Based MEMS Approach

Mark Clifford
In a world where wireless sensing and energy harvesting are becoming pervasive technologies, power consumption is becoming more critical for sensor design. This talk will address methods to achieve an ultra-low power consumption sensor using a capacitive sensing element and capacitive interfacing. Using Kavlico's sCAP technology as a case study, we will step through the low-power design techniques that have enabled the creation of a sensor consuming < 10µW with better than 1% full scale...