B3.4 - Resonant Mode Detection for Fast Determination of Structural and Material Parameters of MEMS

Marco Meinig, Steffen Kurth, Thomas Gessner, Alexey Shaporin & Wilfried Bauer
Fast and nondestructive determination of structural and material parameters of mass-spring-damper systems is a key issue in wafer level MEMS test. The knowledge of these parameters allows the selection of defective devices before the cost intensive packaging step and the control of the fabrication process. The proposed method addresses this problem with a non-contact measurement technique based on laser Doppler interferometry. Measured frequency response functions and natural frequencies obtained from finite element simulations are used...