B4.2 - Analyzing Amplitude and Phase Response of a Differential Pressure Sensor Using a Dynamic Pressure Source

Timo Kober, Ingmar Stoehr, S. Sindlinger & Roland Werthschuetzky
State of the art differential pressure sensors for process instrumentation are characterized by a nominal measuring range of dpN = 10 mbar at a nominal static pressure of pStat = 160 bar and an uncertainty of measurement < 2·10E−3. Environmentally robust pressure sensors based on silicon deformation bodies require static and dynamic overload protections as well as metallic media separation diaphragms. Depending on the application the silicon pressure sensor has to be protected against temperature,...