B4.3 - INKtelligent Printing® of Scale Comprehensive Electrical Connections for Thermal Flow Sensors

Christoph Sosna, Hannes Sturm, Rainer Buchner, Walter Lang, Christian Werner, Dirk Godlinski, Volker Zoellmer & Matthias Busse
New printing technologies of functional structures allow new packaging concepts in order to achieve a high grade of miniaturization for integration of micro electro mechanical systems (MEMS). in this case, a thermal flow sensor, designed and fabricated at IMSAS, has been electrically connected to a printed circuit board by means of INKtelligent printings. We used a maskless aerosol deposition technique for deposition of silver lines with a minimum width of 10 ~m. In this way,...