C2.3 - MEMS Capacitive Sensor Interfaces: Can we Solve the Challenge?

Robert Puers
It is well known that integrated capacitive mechanical sensors offer much higher potentials than their piezo-resistive counterparts as far as sensitivity, temperature behaviour, stability and power consumption are concerned [1]. However, their adoption in regular applications is still moderate, despite these excellent characteristics. One reason is clear : inherently, it is not wise to miniaturize such sensors. The concept is in fact not very compatible with the basics of MEMS, i.e. : the parasitics become...