C3.4 - Application of Pulsed Digital Oscillators to the in Situ Testing of MEMS Vacuum Packaging

Jordi Ricart, Joan Pons & Manuel Dominguez
The purpose of this work is to show that Pulsed Digital Oscillators can be used to monitor the working pressure of MEMS with vacuum packaging. The oscillation frequency can be directly recovered from the bitstream at the output of the oscillator. Experiments are shown on which a MEMS cantilever is subjected to different pressure conditions, and these changes are tracked directly from the bitstream.