ÜV1 - Novel Silicon and Polymer Sensors in Acoustics

Gerhard M. Sessler & Joachim Hillenbrand
Acoustic sensing has witnessed two important innovations in recent years. Firstly, silicon microphones fabricated with the methods of micromachining based on capacitive and optical sensing principles have been developed and are already in commercial use. These transducers show advantages compared to conventional microphones, such as miniaturized size, heat resistance, and insensitivity against vibration. Secondly, piezoelectret sensors, based on a new class of cellular polymers with very high piezoelectric coefficients, are presently being designed and investigated....