A8.4 - Measuring Technology for a Magnetostrictive Microactuator

Thorsten Albach, Alexander Sutor & Reinhard Lerch
The use of materials which convert electrical into mechanical energy is a promising way to design new microsystems. Piezoelectric, magnetostrictive and shape memory materials are used here. Comparing the different conversion principles, magnetostrictive materials show high energy density, short reaction times and non-contact operation. Research on these topics have been made at the Department of Sensor Technology at the University Erlangen-Nuremberg. We fabricate long, narrow bending cantilevers on silicon substrate. Those cantilevers consist of passive...